The study of applying ANP model to assess dispatching rules for wafer fabrication

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摘要

Wafer fabrication is a capital-intensive high-tech sector with highly complex manufacturing processes. Therefore, most of the fabs resort to production dispatching as a means to enhancing production efficiency. The commonly seen methods of production dispatching at the present time are devised to meet single performance indicators. Few methods take into account multiple, or even conflicting performance indicators. Therefore, different production control managers adopt different criteria. Also, as performance indicators change with the variances of production lines and actual demands, it is necessary to clarify the rules of varying dispatching methods and their impacts on all the production performance indicators so that it is possible to explore an architecture for multiple-rule or multiple-target production dispatching in order to meet dynamic performance targets. This paper uses analytical network process (ANP) method to construct a dispatching model based on the characteristics of all the production facilities on-site (such as the utilization of bottleneck machines), in order to explore the relationship among various performance indicators and correlation between performance indicators and the dispatching rules. The aim of this paper is to analyze the production dispatching issues of wafer fabs in an effective and systematic approach, so as to provide an on-site dispatching analysis model that takes into consideration production characteristics and indicator adjustments. This paper finds that the most optimal dispatching method for ANP dispatch model is EDD dispatching method, followed by LS dispatching method. FIFO dispatching method yields the worst performance. The ANP dispatching assess model proposed in this paper can surely serves as an analytical architecture for decision makes to evaluate production dispatching models of multiple production indicators in the future.

论文关键词:Wafer fabrication,Dispatching rules,Analytical network process

论文评审过程:Available online 4 March 2007.

论文官网地址:https://doi.org/10.1016/j.eswa.2007.02.033