Fabrication process suitability ranking for micro-electro-mechanical systems using a fuzzy inference system

作者：

Highlights：

• We developed a system to evaluate alternatives for manufacturing processes for MEMS.

• We define a formal process flow definition for MEMS fabrication.

• We used a fuzzy inference system to evaluate alternatives for MEMS manufacturing.

• It is possible to use our system to effectively improve MEMS development cycle.

摘要

•We developed a system to evaluate alternatives for manufacturing processes for MEMS.•We define a formal process flow definition for MEMS fabrication.•We used a fuzzy inference system to evaluate alternatives for MEMS manufacturing.•It is possible to use our system to effectively improve MEMS development cycle.

论文关键词：MEMS manufacturing,Process Suitability,Fuzzy decision-making,Fuzzy inference systems

论文评审过程：Available online 23 December 2013.

论文官网地址：https://doi.org/10.1016/j.eswa.2013.12.018