A probabilistic model for predicting the uncertainties of the humid stiction phenomenon on hard materials
作者：
Highlights：
• An alternative to the statistical method is proposed to evaluate the adhesive forces.
• Numerical surfaces are generated from a psd function defined from AFM measurements.
• An asperity approach is applied on these surfaces to compute the adhesive forces.
• The method is able to capture uncertainties and size effects in the adhesive forces.
• The method can be used to predict the stiction in MEMS devices.
摘要
•An alternative to the statistical method is proposed to evaluate the adhesive forces.•Numerical surfaces are generated from a psd function defined from AFM measurements.•An asperity approach is applied on these surfaces to compute the adhesive forces.•The method is able to capture uncertainties and size effects in the adhesive forces.•The method can be used to predict the stiction in MEMS devices.
论文关键词：Stiction,Capillary force,Surface generation,Hertz model,DMT model,GW approach
论文评审过程：Received 20 September 2014, Revised 11 December 2014, Available online 17 February 2015, Version of Record 27 May 2015.
论文官网地址：https://doi.org/10.1016/j.cam.2015.02.022
